Wafer inspection
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- 15. Wafer defect inspection system - Hitachi High-Tech
- 2Wafer Inspection - Semiconductor Engineering
The idea is to find a defect of interest on a wafer. In the inspection process, a wafer inspectio...
- 3Wafer defect pattern recognition by multi-class support vector ...
Wafers are inspected during manufacturing by retrieving information about defect patterns by manu...
- 4Patterned Wafer Inspection - Newport
- 5深度學習對回收晶圓的瑕疵分類 Reclaim wafer defect ...
This study construct an automated reclaim wafer defect classification system, which applies deep ...